Germany – Laboratory, optical and precision equipment (excl. glasses) – Procurement procedure for the delivery of a vapor deposition system

Opportunity description

Procurement procedure for the delivery of a vapor deposition system The subject of the tender is the delivery and handover in operational condition, including functional testing, instruction and acceptance, of a system for plasma-enhanced chemical vapor deposition (PECVD) with an inductively coupled plasma source (ICP) for the production of high-quality material films with precisely defined layer thicknesses in the nanometer-to-micrometer range. The planned ICP-PECVD system is intended to enable the targeted deposition of dielectric thin films with controllable optical properties and precisely controllable layer thicknesses through in-situ monitoring. High-quality dielectric layers for optical passivation, optical waveguides and multilayer systems, as well as hard masks for high-resolution lithography processes, are to be deposited. As part of our research work, silicon dioxide, silicon nitride, amorphous silicon and diamond-like carbon layers are to be capable of being deposited in an optimized manner using a new system. Due to the requirements of the approval procedure for major equipment, the maximum available financial resources are limited and end at EUR 806,000 (including value-added tax or comparable taxes, customs duties and any cash discounts). Tenders exceeding this threshold cannot be considered. Value-added tax and customs duties to be stated for calculation purposes are part of the threshold. The offered service comprises the following items: - Offer and delivery of a new device or new goods - Timely delivery and complete installation at the place of use. - Disposal of packaging and surplus components. - Functional testing or demonstration as well as instruction and commissioning. - Acceptance of the device at the customer’s premises - On-site training (3 days of 8 hours each) for 2 employees of Heidelberg University. Procedure: open. Review the original TED notice for the complete requirement, lots, amendments and attachments.