Germany – Various office equipment and supplies – Cure Anneal (IZM-139) - PR1233787-3460-P

Opportunity description

Cure Anneal (IZM-139) 1x Cure Anneal (IZM-139) The purpose of this equipment specification is to define basic requirements for a curing/annealing furnace with controllable temperature increases, a highly stable temperature process, and a defined gas atmosphere for various substrate types and sizes (Si, glass with wafer sizes of 300 mm and 200 mm). Before the curing/annealing process, the wafers are delivered to the equipment in Front Opening Unified Pods (FOUPs), which are placed by the operator on the respective load ports. The equipment must be capable of performing the following sequence of steps fully automatically: • automatic unloading of the wafers from the FOUPs • Defined process steps in a temperature-, pressure-, and gas-controlled area • Reloading the wafers into the starting position in the FOUP To ensure high throughput, the machine must be equipped with two load ports. It must be possible to program recipes within a reasonable range of options and parameters, as required for research and development (R&D). Procedure: neg-wo-call. Review the original TED notice for the complete requirement, lots, amendments and attachments.